JPH0576542B2 - - Google Patents

Info

Publication number
JPH0576542B2
JPH0576542B2 JP60225384A JP22538485A JPH0576542B2 JP H0576542 B2 JPH0576542 B2 JP H0576542B2 JP 60225384 A JP60225384 A JP 60225384A JP 22538485 A JP22538485 A JP 22538485A JP H0576542 B2 JPH0576542 B2 JP H0576542B2
Authority
JP
Japan
Prior art keywords
sputtering
vacuum chamber
substrate
pallet
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60225384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283467A (ja
Inventor
Yoshiteru Murakami
Akira Takahashi
Kenji Oota
Michinobu Saegusa
Tomoyuki Myake
Kazuo Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP22538485A priority Critical patent/JPS6283467A/ja
Publication of JPS6283467A publication Critical patent/JPS6283467A/ja
Publication of JPH0576542B2 publication Critical patent/JPH0576542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP22538485A 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置 Granted JPS6283467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22538485A JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22538485A JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS6283467A JPS6283467A (ja) 1987-04-16
JPH0576542B2 true JPH0576542B2 (en]) 1993-10-22

Family

ID=16828509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22538485A Granted JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS6283467A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147061A (ja) * 1987-12-02 1989-06-08 Sharp Corp パレット移動型スパッタリング装置
JPH02115366A (ja) * 1988-10-25 1990-04-27 Sumitomo Special Metals Co Ltd スパッタリング装置
KR20070043541A (ko) * 2005-10-21 2007-04-25 삼성에스디아이 주식회사 박막 증착장치 및 이를 이용한 박막 증착방법
KR101769493B1 (ko) * 2011-12-23 2017-08-30 주식회사 원익아이피에스 기판처리장치 및 그를 가지는 기판처리시스템
EP2650135A1 (en) 2012-04-12 2013-10-16 KBA-NotaSys SA Intaglio printing plate coating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180756U (en]) * 1981-05-08 1982-11-16

Also Published As

Publication number Publication date
JPS6283467A (ja) 1987-04-16

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